6 Substructures 10

6 Substructures 10 - Sub-structures Our goal is to exploit...

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Sub-structures Our goal is to exploit scaling opportunities but… Who needs it? Can they (or we) afford it? How do we do it? P erformance, P rice and P hysics ! More
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The exploitation of sub-structures in silicon Now that we know something about the starting material, what do we do with it ? The exploitation of silicon continues with an exploitation of the most basic building blocks Contacts Junctions MOS capacitors Isolation structures – these are device sub-structures! (This is a refresher on material you have already seen in device courses but think how this relates to processing!)
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Simple CMOS Device section Interconnect ILD via gate source drain channel n-well p-well p-channel transistor n-channel transistor isolation fox Some basic terms CD These should be familiar to you!
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Consider 4 sub-structures p-well n + Metal - Si contact pn junction MOS capacitor LOCOS isolation
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It is relatively difficult to make a good contact to Si. Factors which inhibit ohmic contact formation are: Surface oxide Schottky barrier V i This is what we want No barrier. Low resistance. Metal-Si contacts
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Good metal-Si contacts Solution: Always make metal contact to (almost) degenerate Si Barrier is thin enough to allow direct carrier injection
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6 Substructures 10 - Sub-structures Our goal is to exploit...

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