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23 Device models 10

23 Device models 10 - Device Models This lecture covers...

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Modeling allows us to predict system performance and manage changes and errors Modeling includes process, device, and system simulation Specialized test structures are required on the wafer to obtain parameters for models Device Models This lecture covers modeling and parameter extraction…
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Product creation cycle Specification Product acceptance CUSTOMER Code CAD Maskmaking Fab Assembly Test Start End Total time for cycle may be 12 months. How do we manage changes? Use MODELS to predict the effects of change! Predicted performance Models allow us to predict performance (used in testing ) and are used to aid layout generation (used in maskmaking )
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What can we predict - and how? Device structure and characteristics Power dissipation Signal timing System performance Process Equipment Device Circuit Package System Simulation hierarchy
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Process simulation e.g. SUPREM Layer deposition Dopant distribution Thermal changes e.g. SAMPLE, DEPICT Topographical simulators for CD, registration and coverage Outputs: 1-, 2- or 3-D profiles There are various types of process simulators available
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Device simulation Solve Poisson and continuity equations with simulated dopant profiles as boundary conditions – models are available!
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Device models Challenge: How to represent a transistor which has 3 current equations
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