Semiconductor_industry_terminology

Semiconductor_industry_terminology - SEMI ® International...

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Unformatted text preview: SEMI ® International Standards: Compilation of Terms (Updated 0703) Contents Abbreviations and Acronyms 2 Definitions 17 © SEMI 1978, 2003 COMPILATION OF TERMS (Updated 0703) 2 Table 1 Abbreviations and Acronyms Term Meaning Standard(s) %F.S. Percent full scale SEMI E77, SEMI E80 &C degrees Celsius SEMI C3, F59, F67, F68 &F temperature, degrees Fahrenheit SEMI C3, F67, F68 A absorbance SEMI C1 ¯ angstrom (s) SEMI C1 A Actuator (a CDM class definition) SEMI E54.2 A Measured Value SEMI E56 a.c. alternating current SEMI C1 Aa Average measured value SEMI E56 Aa Average measured value at 100% setpoint SEMI E56 AAS/GFAAS atomic absorption spectroscopy/ graphite furnace atomic absorption spectroscopy SEMI F48 ACGIH American Conference of Governmental Industrial Hygienists SEMI S15, S18 ACID Atomicity Consistency Isolation Durability SEMI E96 AD Accuracy of the DUT SEMI E56 addn. addition SEMI C1 ADf Accuracy of the flow standard SEMI E56 AE Active Element (a CDM class definition) SEMI E54.2 AES Auger Electron Spectroscopy SEMI F72 AGT Automated Guided Transport SEMI E82, E87, E109 AGV automatic guided vehicle (cart) SEMI E87, E98, E101, E106, E109 Al Measured value, down cycle SEMI E56 alc. alcohol(ic) SEMI C1 AMHS Automated Material Handling Systems SEMI E81, E82, E85, E87, E88, E92, E98, E103, E109 amp. ampere(s) SEMI C1 amt. amount SEMI C1 amu atomic mass unit SEMI F48 ANSI American National Standards Institute SEMI T6 AOV Air-operated valves SEMI F22 APC Advanced Process Control SEMI E81, E98 APCFI Advanced Process Control Framework Initiative SEMI E81 API Applications Programming Interface SEMI E54, E81 APIMS Atmospheric Pressure Ionization Mass Spectrometer SEMI F33, F56, F67, F68 approx. approximate(ly) SEMI C1 aq. aqueous SEMI C1 Ar Argon SEMI E49 ARAMS Automated Reliability, Availability, and Maintainability Standard SEMI E58, E98, M52 ARHS Automated Reticle Handling System SEMI E109 AS Accuracy of setpoint SEMI E56 ASCII American Standard Code for Information Interchange SEMI M52 ASC X12 Accredited Standards Committee X12 SEMI T6 ASME American Society of Mechanical Engineers SEMI E49 ASO Automatic shutoff valve SEMI F22 ASTM American Society of Testing and Materials Standards SEMI C3, E49 ATE automatic test equipment SEMI G79, G80 COMPILATION OF TERMS © SEMI 1978, 2003 (Updated 0703) 3 Term Meaning Standard(s) ATM Atmospheric SEMI F51 atm. atmosphere(s) SEMI C1, C3, F74 Au Measured value, up cycle SEMI E56 av. average SEMI C1 B Bias SEMI E56 b.p. boiling point SEMI C1, C3 BCDS Bulk Chemical Distribution System SEMI F41, F51 BOX Buried Oxide SEMI M34 BOX Buried oxide layer SEMI M47 BP Buffer Port SEMI E88 C Controller (a CDM class definition) SEMI E54.2 c.d. current density SEMI C1 ca. circa (i.e., about or approximately) SEMI C1 cal. calorie(s) SEMI C1 CAN Controller area network SEMI E54.4 cc cubic centimeter(s) (mL) SEMI C1, C3, F74 CDA Clean, dry air SEMI F28, F59 CDM Common Device Model SEMI E54, E54.2, E54.4, E54.6, E54.7, E54.8, E54.9, E54....
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This note was uploaded on 05/11/2010 for the course EEE EEE-530 taught by Professor Kozicki during the Spring '10 term at ASU.

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Semiconductor_industry_terminology - SEMI ® International...

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