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EMS162_2010_RHEED

EMS162_2010_RHEED - RHEED Patterns Rockett the Materials...

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1 3/11/2010 Transmission Electron Microscopy 29 Yayoi Takamura Reflection High Energy Electron Diffraction Surface analysis technique In situ monitoring of thin film growth processes – Angle between electrons and sample < 5º – Diffraction occurs with top 1-2 monolayers of sample 3 Rockett, the Materials Science of Semiconductors 3/11/2010 Transmission Electron Microscopy 30 Yayoi Takamura RHEED System E gun camera Aperture Phosphor Sample Vacuum chamber Pumping Stations
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