EMS162_2010_RHEED

EMS162_2010_RHEED - RHEED Patterns Rockett, the Materials...

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1 3/11/2010 Transmission Electron Microscopy 29 Yayoi Takamura Reflection High Energy Electron Diffraction • Surface analysis technique In situ monitoring of thin film growth processes – Angle between electrons and sample < 5º – Diffraction occurs with top 1-2 monolayers of sample 3 Rockett, the Materials Science of Semiconductors 3/11/2010 Transmission Electron Microscopy 30 Yayoi Takamura RHEED System E gun camera Aperture Phosphor Sample Vacuum chamber Pumping Stations
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2 3/11/2010 Transmission Electron Microscopy 31 Yayoi Takamura
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Unformatted text preview: RHEED Patterns Rockett, the Materials Science of Semiconductors 3/11/2010 Transmission Electron Microscopy 32 Yayoi Takamura Points on an arc Streaks Points on a grid like a TEM pattern Rockett, the Materials Science of Semiconductors 3 3/11/2010 Transmission Electron Microscopy 33 Yayoi Takamura RHEED Pattern from Silicon Wafer Spots on an arc Kikuchi lines 3/11/2010 Transmission Electron Microscopy 34 Yayoi Takamura Growth Rate Monitoring Pascal, Co...
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EMS162_2010_RHEED - RHEED Patterns Rockett, the Materials...

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