EMS162_2010_SEM

EMS162_2010_SEM - Levels of Structure / Electromagnetic...

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1 1/26/2010 EMS 162 - Winter 2010 1 Yayoi Takamura Levels of Structure / Electromagnetic Spectrum Advanced Light Source f c = λ hc hf E = = atomic nuclear XRD/TEM SEM nano micro macro OM Technique Level 1/26/2010 EMS 162 - Winter 2010 2 Yayoi Takamura Electron Microscopy Techniques • Electrons are not part of the electromagnetic spectrum • Scanning Electron Microscopy (SEM) • Transmission Electron Microscopy (TEM) • Scanning Transmission Electron Microscopy (STEM) 2 0 0 0 0 2 1 1 2 2 c m eU eU m h eU m h v m h p h + = = = = considering relativistic effects U =accelerating voltage, m 0 = electron mass, e = electron charge
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2 1/26/2010 EMS 162 - Winter 2010 3 Yayoi Takamura Scanning Electron Microscope User computer interface Pumps, control boxes, etc… Sample Chamber Electron gun Detector 1/26/2010 EMS 162 - Winter 2010 4 Yayoi Takamura Electron – Sample Interactions Sample Incoming Electron Beam Secondary Electrons Backscattered Electrons Auger Electrons X-rays Cathodoluminescence (visible light) Diffracted Electrons 2 0 0 0 0 2 1 1 2 2 c m eU eU m h eU m h v m h p h + = = = = λ For electrons: considering relativistic effects U =accelerating voltage, m 0 = electron mass, e = electron charge
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3 1/26/2010 EMS 162 - Winter 2010 5 Yayoi Takamura Interaction Volume • Interaction volume depends on: – Diameter of the primary beam – Energy of the primary beam
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This note was uploaded on 05/14/2010 for the course EMS 162 taught by Professor Howitt during the Spring '08 term at UC Davis.

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EMS162_2010_SEM - Levels of Structure / Electromagnetic...

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