EMS162L_Discussion_SEM

EMS162L_Discussion_SEM - Scanning Electron Microscope EMS...

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Scanning Electron Microscope EMS 162L
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1/25/2010 Scanning Electron Microscope 2 Sangtae Kim Scanning Electron Microscope User computer interface Pumps, control boxes, etc… Sample Chamber Electron gun Detector
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1/25/2010 Scanning Electron Microscope 3 Sangtae Kim Electron – Sample Interactions Sample Incoming Electron Beam Secondary Electrons Backscattered Electrons Auger Electrons X-rays Cathodoluminescence (visible light) Diffracted Electrons 2 0 0 0 0 2 1 1 2 2 c m eU eU m h eU m h v m h p h + = = = = λ For electrons: considering relativistic effects U =accelerating voltage, m 0 = electron mass, e = electron charge
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1/25/2010 Scanning Electron Microscope 4 Sangtae Kim Interaction Volume • Interaction volume depends on: – Diameter of the primary beam – Energy of the primary beam – Atomic weight of the specimen – Coating of the specimen • Escape Depth: – X-rays can escape from further in the sample – Electron escape depth depends on energy of electron www.uga.edu
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1/25/2010 Scanning Electron Microscope 5 Sangtae Kim SEM Cathodes • Cathode used to generate the electron beam – Type of cathode determines the apparent source size, the brightness, and the vacuum required in the system.
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This note was uploaded on 05/14/2010 for the course EMS 162l taught by Professor Staff during the Spring '08 term at UC Davis.

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EMS162L_Discussion_SEM - Scanning Electron Microscope EMS...

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