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Unformatted text preview: ceil functions return the largest and smallest integers which are larger and smaller than their arguments. Here, the distance between e1 and em, is defined as the range of windowing which is an estimate of the minimum deviation zone of the inspected geometry. It is expected that in the scale of profile inspection, least square best fitting converges to a statistical estimation of the substitute geometry which results in the maximum density for the average observed geometric deviations the maximum density geometric deviations. Therefore, studying the gradient of the obtained density function can provide a suitable metric to evaluate efficiency of the data sampling. By studying the changes in gradient of density function, regions of the geometric deviations with the local maximum and minimum densities are recognized. The new points are sampled to validate the current estimation of the local maximum/minimum densities. Regions of the geometrical deviation corresponding to the local maximum/minimum...
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- Spring '10
- The Land