In its initial configuration all layers of the

Info iconThis preview shows page 1. Sign up to view the full content.

View Full Document Right Arrow Icon
This is the end of the preview. Sign up to access the rest of the document.

Unformatted text preview: ufactured [O’ Neal et al., 2002]. The nanodrill is intended for drilling holes on the order of a few hundred nanometers. Several applications can be envisioned for such a device, from uses in data storage technologies to the creation of microfluidic channels. Due to the high accuracies often required for technologies on this scale, the dimensional quality of the final hole is of interest. The error analysis performed in this paper is used to determine the final error in the size and position of the drilled hole due to static and kinematic effects. A linearized sensitivity approach is used to identify the most important factors influencing the hole’s quality. The results indicate that the high tolerances in the existing drill’s architecture make it impossible to obtain holes of the proposed dimensions. Keywords: Nanotechnology, Error, Dimensional Quality, Kinematic, Static 1. INTRODUCTION Electromechanical devices on the micro and nano scales have found a wide range of applications. Traditionally, these devices were planar and were produced with the same techniques used in the manufacture of integrated circuits. However,...
View Full Document

This note was uploaded on 08/03/2010 for the course DD 1234 taught by Professor Zczxc during the Spring '10 term at Magnolia Bible.

Ask a homework question - tutors are online