The following equations describe the geometric

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Unformatted text preview: novel manufacturing techniques, specific to micro and nano devices, have emerged [Judy, J., 2001]. These new techniques have led to the development of 3-D mircro and nano structures [O’ Neal et al., 2002]. Two examples of these new 3-D structures are MIT’s microengine [Khanna, R., 2003] and IBM’s nanodrive [Vettiger et al., 2003]. The emergence of these 3-D devices necessitates the development of novel manufacturing processes and technologies. The University of Arkansas has proposed and developed the nanodrill for the drilling of nanochannels as one such new manufacturing technique. The nanodrill is intended for drilling holes of 100-300nm in diameter and 50100nm deep. An actuator system connected to a drive gear rotates the load gear on 277 J.K. Davidson (ed.), Models for Computer Aided Tolerancing in Design and Manufacturing, 2 77– 287. © 2007 Springer. 278 A. Bryan et al. which the nanodrill is mounted as shown in Figures 1 (a)-(b). The drill’s system consists of several layers of surface micromachined materials as shown...
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