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Unformatted text preview: L /C O at a few f values (e.g. f=0, 0.4, 0.8). What would be C L /C O at f=1? 7. Show that for CZ growth, the total amount of impurity is conserved (i.e. ∫ C s dV s =C o V o .). 8. Short calculations. (1) If the temperature gradient in CZ silicon is 100 o C/cm, calculate the maximum pull rate. (2) For zone refining of phosphorus with multiple passes, what is the doping concentration at the beginning of the boule (i.e. x=0) after 5 passes? (3) For zone refining (single or multiple passes), assume the boule is infinitely long, what is the impurity concentration in the melt (i.e. C L /C o ) for x>>>L? (e.g. x=1000L, assume k o =0.1)...
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This note was uploaded on 08/12/2010 for the course NE NE 343 taught by Professor Bo during the Spring '10 term at Waterloo.
- Spring '10