Top_down_fabrication

Top_down_fabrication - CHE 494/598 Nanobiotechnology CHE...

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CHE 494/598 – Nanobiotechnology CHE 494/598 – Nanobiotechnology Michael Goryll Department of Electrical Engineering Lecture Notes Top-Down Micro- and Nanofabrication structure definition using lithographic techniques pattern transfer using etching
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Introduction – The Conventional Si Transistor Introduction – The Conventional Si Transistor R. Chau et al., 61 st Device Research Conference, Salt Lake City, Utah, 2003 (INVITED TALK) Do Intel’s nanostructures use bottom-up technology? No!
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Introduction Introduction Bottom – Up technologies very often have the following drawbacks: broad size distribution of features lack of spatial control no possibility of alignment to existing structures M. Goryll et al, Mater. Sci. Eng. B 101 (1-3), p. 9-13 (2003) Top – Down design is all about controlling the size and location of the micro- or nanostructures Example: Atomic force micrograph of self-organized Ge dots(bottom-up) grown on a facetted Si mesa, deposited by selective epitaxy in a photolithographically defined oxide window (top-down).
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Top_down_fabrication - CHE 494/598 Nanobiotechnology CHE...

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