Unformatted text preview: 7. What are the important requirements of LIGA mask? 8. How would you fabricate a mask for LIGA process? 9. What are the two limiting factors that adversely affect the possible resolution in LIGA? 10. What are the important applications and major limitations of LIGA? 11. Which applications are better suitable for LIGA when compared to other techniques that can be used to achieve high aspect ratios?...
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- Spring '10
- Ratio, Photolithography, LIGA, LIGA exposure dosage