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Unformatted text preview: 2. sacrificial process vii. LIGA Lithography Doping Metals Polymers Insulators Conductors Etching Deposition Spinning Wet Sputtering Evaporation CVD Oxidation Isotropic Dry RIE Anisotropic Non Plasma Sputtering 1. Why is cleanroom environment important in MEMS? 2. What are the common impurities in cleanroom? 3. What are important parameters to consider in designing a cleanroom? 4. What do the different classes with respect to cleanroom mean to you? 5. What are the important considerations in terms of chemicals and utilities in microfab facility? 6. Why are the vacuum systems important in microfab? 7. What is mean free path and why is it important for MEMS applications?...
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- Spring '10
- Semiconductor device fabrication, Microelectromechanical systems, Microtechnology, microfab, LIGA Conductors Metals, typical MEMS device