rn - 3. What are the fabrication steps for ring gyroscope...

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Lecture 9 Gyroscopes—Dr. Najafi Review Notes 1. What are the main applications of gyroscopes? What does a gyroscope measure? 2. What was the main working principle behind gyroscope presented by dr. Najafi?
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Unformatted text preview: 3. What are the fabrication steps for ring gyroscope starting with (111) wafer? 4. How does packaging affect the device demonstrated by group from Georgia Tech?...
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This note was uploaded on 09/02/2010 for the course MEEN 5050 taught by Professor Himanshuj.sant during the Spring '10 term at University of Utah.

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