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Unformatted text preview: 3. What are the fabrication steps for ring gyroscope starting with (111) wafer? 4. How does packaging affect the device demonstrated by group from Georgia Tech?...
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This note was uploaded on 09/02/2010 for the course MEEN 5050 taught by Professor Himanshuj.sant during the Spring '10 term at University of Utah.
- Spring '10