24 - Electro Chemical Deposition: Principles, Methods and...

Info iconThis preview shows pages 1–5. Sign up to view the full content.

View Full Document Right Arrow Icon
Electro Chemical Deposition: Principles, Methods and Applications Himanshu J. Sant Fundamentals of Microfabrication Electroplating Overview • Introduction • Experimental Setup • Importance of Electro Deposition • Bath Formulations • Electroless and Displacement Depositions • Equilibrium Electrode Potentials • Factors Affecting the Electrodeposits • Micro and Nano-scale Structures
Background image of page 1

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon
What is Electrodeposition? • Process of coating a thin layer of one metal on top of a different metal • Method to modify surface properties. • Can be used to: – Create structures (especially hard and stiff) – Make molds – Increase electrical conductivity – Improve corrosion resistance – Improve heat tolerance Electroplating Applications • Automotive parts • Printed circuitry and electrical contacts • General engineering components • Gold-Silver wares and Jewelry • Musical Instruments and Trophies • Soft metal gaskets • Anti-seize bearings • Production of micro parts for MEMS
Background image of page 2
Plate • Au • Ni • NiFe • Cu • Pt • Sn • PbSn Yaw Sensor: Delco Microspring: Formfactor Gold Bond Pads Close up - Yaw Sensor Electroplating Materials (from Semitool) Electrophoretic Resist (EPR) 3-Dimensional Conformal Photoresist 40 µm Tall Feature 6 µm x 25 µm EPR lines Electrodeposited Photoresist
Background image of page 3

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon
Deposits Uniformly on Conductive Surfaces • Current Thickness 4 µm to 12 µm • Expand Thickness Range < 1 µm and up to 150 µm 92 µm Tall Feature 6 µm EPR Electrodeposited Photoresist X-ray mask Resist Substrate Development LIGA Process
Background image of page 4
Image of page 5
This is the end of the preview. Sign up to access the rest of the document.

Page1 / 13

24 - Electro Chemical Deposition: Principles, Methods and...

This preview shows document pages 1 - 5. Sign up to view the full document.

View Full Document Right Arrow Icon
Ask a homework question - tutors are online