19b - System Integration Himanshu J. Sant Fundamentals of...

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System Integration Himanshu J. Sant Fundamentals of Micromachining sensor electronics actuator System Integration • Interfacing of electronics with sensors/actuators – (decision making capability or intelligence)
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•Pre-IC fabrication •Co-IC fabrication •Post-IC fabrication Post-IC fabrication requires : •Low temperature < 450 C •Benign chemical environment •Benign radiation requirement System Integration Definition • MEMS integration at different levels Micromachined Structure Semiconductor Component System Level Application Wingback Accelerometer
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Integration of chemical, mechanical, biochemical or optical microsystems with electronics circuit design and simulation Monolithic Integration circuit fabrication at a foundry fabricated microsystem on a chip with circuits Accelerometer Gas sensor
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Summary of Steps for Monolithic Integration • Circuit design and simulation • CMOS circuit fabrication at foundry • Co- and Post-IC MEMS fabrication • System packaging Example Application
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19b - System Integration Himanshu J. Sant Fundamentals of...

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