22b - RF MEMS Growth Projections Thousands Motivation for...

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RF MEMS Growth Projections Thousands Motivation for RF MEMS •From S. Chou, “MEMS R&D at Intel,” April 25, 2001
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RF MEMS Concept VCOs, tunable Filters Improved Q-value and tuning range for On-Chip Varactors Tunable Capacitors Matching components, Baluns, VCOs Improved Q-value for On-Chip Inductors High-Q Inductors Small size, RF-System-On-Chip capability Micro-mechanical Resonators Band-Switches, duplexer-Switches, Bypass-Switches No static power consumption, low loss and signal distortion RF-Switches (electrostatic) Applications / Advantage RF MEMS device RF MEMS for Mobile Phones RF-front-end
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RF MEMS Applications RF MEMS
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Integrated Passive Components • Problems with integrated passive components – Low Q factor – High occupied surface (60% of total area) – Very cumbersome packaging • Advantages of MEMS integrated passive components – Improved performance • Very high Q- from 40 to 70 at 4 GHz for inductances • Reduction of capacitive effects for inductances • Less noise • Low power consumption – Integration: light, small volume, compatibility – Packaging: substantially improved packaging efficiency MEMS Switches • Advantages of micro switches
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This note was uploaded on 09/02/2010 for the course MEEN 5050 taught by Professor Himanshuj.sant during the Spring '10 term at University of Utah.

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22b - RF MEMS Growth Projections Thousands Motivation for...

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