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final review - application areas presented in class 5 Be...

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Fundamentals of Micromachining Final Exam Review Sheet BIOEN 6421, EL EN 5221 and 6221, ME EN 5050 and 6050 4/20/10 The final exam will be comprehensive and will be on Wednesday, May 3 from 10:30 AM– 12:30 PM. The final exam will be open book (one textbook only!) and open note. You will not be able to share books or notes with other students in the class. 1. Know everything on the first review sheet. Focus on homeworks, midterm review and midterm. 2. There will be several questions about fabrication processes to make a device that was presented in class. These questions will be similar to those on Exam 1. 3. Know the all the different microfabrication processes and what they are used for, and why you would use one method compared to another. 4. Know the fundamental advantages associated with microfabrication related to the
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Unformatted text preview: application areas presented in class. 5. Be aware of the key application areas of MEMS and how these systems work. Know why these systems work well on the microscale (i.e. scaling effects). 6. Know which applications have been successfully commercialized. 7. The first section of the final will be similar to the first test. Reviewing the earlier test would likely be profitable. 8. The second portion of the test will be a design problem similar to those assigned as homework. You will be asked to give the fabrication procedures and mask layouts you would use to generate a useful MEMS device. I will try to pick a design question that will require you to know only basic physics and engineering....
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