Unformatted text preview: application areas presented in class. 5. Be aware of the key application areas of MEMS and how these systems work. Know why these systems work well on the microscale (i.e. scaling effects). 6. Know which applications have been successfully commercialized. 7. The first section of the final will be similar to the first test. Reviewing the earlier test would likely be profitable. 8. The second portion of the test will be a design problem similar to those assigned as homework. You will be asked to give the fabrication procedures and mask layouts you would use to generate a useful MEMS device. I will try to pick a design question that will require you to know only basic physics and engineering....
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- Spring '10
- Microfabrication, Micromachining BIOEN