4 - Fundamentals of Microfabrication Himanshu J Sant Issues...

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Fundamentals of Microfabrication Himanshu J. Sant Issues for Today • Lab this week: Polysilicon and stress measurements • Homework #1 uploaded – Due Jan 27 th in class • If issues on HW, please let me know • Quiz uploaded on webct, due Jan 27 th – Lecture slides and chapter 1, Madou Text • If issues with project topic selection, please let me know • Last week review
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Photoresist Profiles • Vertical – 75-95 0 • Overcut – 45-75 0 • Undercut – 95-110 0 – Negative resist • Permanent – Positive resist (LIFT- OFF) Dose : High Developer: Low Dose : Medium Developer: Moderate Dose : Low Developer: Dominant Courtesy: Mark Madou, UC Irvine Table 1.8, Text for more info. Basic Design and Project Guidelines Himanshu J. Sant Fundamentals of Microfabrication
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Objectives • To review design process • To apply this process to semester design projects • To understand the components of the design project and how they will be graded Design • The class is essentially a design for manufacturing class • At the same time, our designs are limited by rational micromanufacturing techniques • How do we design considering our constraints?
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What is Design? Design is decision making based on our ability to ask the right questions and then answer them Design Process- Customer Requirements Design Questions • What does the customer want? • What are the engineering implications? Design Steps • Functional Specification
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Design Process-Concept Generation Design Questions • What concept can meet the customer requirements? • Which are best? • Will the best really work? Design Steps • Concept generation and evaluation Design Process- Specifications Design Questions • For the concept selected, what are the parts that are needed? • What are the relative specs? • How will they be put together? Design Steps • Layout design
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Design Process-Performance Matrix Design Questions • What are the critical parameters of the design? • What values should
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This note was uploaded on 09/02/2010 for the course MEEN 5050 taught by Professor Himanshuj.sant during the Spring '10 term at Utah.

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4 - Fundamentals of Microfabrication Himanshu J Sant Issues...

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