1 - Fundamentals of Microfabrication Dr Himanshu J Sant...

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Fundamentals of Microfabrication Dr. Himanshu J. Sant State of Utah Center of Excellence for Biomedical Microfluidics Department of Mechanical Engineering Learning Objectives • Understand MEMS language • Get an overview of the processes • Get an overview of the class • Learn MEMS capabilities and applications
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Overview • What is micromanufacturing and MEMS? • Why the interest in MEMS? • IC Fabrication Processes • Bulk Micromachining Processes • Surface Micromachining Processes • Combined Processes • References MEMS - evolved from the Microelectronics Revolution IC Industry Timeline 1999 1947 single transistor 1958 first IC 10 M transistors 2 B transistors 2008
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Moore’s Law Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common substrate through the utilization of microfabrication technology or “microtechnology”. So what exactly is MEMS?
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Pressure sensors Accelerometers Flow sensors Inkjet printers Deformable mirror devices Gas sensors Micromotors Microgears Lab-on-a-chip Systems MEMS Timeline 1980 2030 1999 (1.3 million micro-mirrors) TI DMD ? Bulk micromachined
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This note was uploaded on 09/02/2010 for the course MEEN 5050 taught by Professor Himanshuj.sant during the Spring '10 term at Utah.

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1 - Fundamentals of Microfabrication Dr Himanshu J Sant...

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