7%20Overview - Materials Science for MEMS Himanshu J. Sant...

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Materials Science for MEMS Himanshu J. Sant BIOEN 6421 EL EN 5221 and 6221 ME EN 5050 and 6050 Overview • Silicon as a material • Crystallography • Crystal defects and impurities • Wafer manufacture • Stress and strain
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Material Properties • Material failure – Yield stress – Ductile and brittle failure – Plastic deformation – Ultimate stress and strength – Some fail in shear, compression, tension – Fatigue- failure under cyclic conditions though well below yield stress – Creep- time dependent extension • Stress relaxation – Toughness • Energy absorption to failure • Material properties – Consistent numbers not always available – Variation in runs, machines, locations – Structures generally a laminate composite – Properties may be function of fabrication process or post- processing – Measurement of key properties such as stress, Young’s modulus, strength, and Poisson’s ratio Surface Properties • Surfaces are uniquely reactive • Surfaces are different from the bulk
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7%20Overview - Materials Science for MEMS Himanshu J. Sant...

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