9a - © K. Najafi,2010 slide: 1 Khalil Najafi Center for...

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Unformatted text preview: © K. Najafi,2010 slide: 1 Khalil Najafi Center for Wireless Integrated MicroSystems (WIMS) University of Michigan 1301 Beal Avenue Ann Arbor, Michigan 48109-2122 Tel: (734) 763-6650, FAX: (734) 763-9324 e-mail: [email protected] High-Performance Micromachined Angular Rate Sensors, “Gyroscopes” © K. Najafi,2010 slide: 2 Outline • Introduction of [email protected] • Review of Gyroscopes • Ring Gyroscopes • Conclusions Research Industrial Programs G r a d u a t e P r o g r a m O u t r e a c h U n d e r g r a d u a t e P r o g r a m A l u m n i ¡ ¢ ¡ £ ¤ ¥ ¦ £ § ¢ § ¨ © £ ª « ¬ ­ ¤ ¡ ¥ ¡ ¨ ® ¦ ¨ ¡ ¡ ¥ ¦ ¨ ® ; « ¦ £ ¯ ¦ ® § ¨ ¯ ª « ¡ ¡ £ ¡ °(+±²#(' ¡#&$!!²± ©²³&²²' ®&´#(²± ¥´# µ#³ 7­3°3 ¨²-':¶¥8 ¡¡ +#±²&³&´± BFG4DCC ACI4AHD F £¡ +#±²&³&´± AFF4DCC DE4AHD G ¡¡ ³&´± «° FG4AAF [email protected] F ¡¡2°/'(²"' ³&´± «° DI4AAF [email protected] F ¡¡ ³&´± ¬¯© AGI4BFB CD4DH F ¡¡2°/'(²"' ³&´± ¬¯© HC4BFB AD4DH F Students ·¸B@@H AIIH5¹+#² B@@I ¡.(²&#´! ¥²'²´&º» ·+#±µ#³2 =BH« AG@ ¬´(²#(' FBE ©µ'º!$'+&²' 9·¸B@@H2 [email protected] AIC ¢µº²#'²' JBI '(´&(+%' Research Centers ¡¢£¤¢¥¦§ ¨§©ª«¬«­ ®¯° ±²¦©³¦ ´£¢­§£­ ¦§µ ¶§¥¢§­­°¢§¥ ·­§«­° ®¯° ¸²«°¦®¦©« ¹ºª£¦² ´£¢­§£­ ·­§«­° ®¯° ¡¢£°¯­²­£«°¯§¢£© ¦§µ ´­§©¯°© ·­§«­° ®¯° »¢°­²­©© ¨§«­¥°¦«­µ ¡¢£°¯©¼©«­³© ¬&$¼²''$&'2 CI4FC ¥²'3 °ºµ32 AD §''$º3 ¬&$¼32 [email protected] ¬$'( ©$º'2 BG §''(3 ¬&$¼32 AD4FC ½µ'µ)#³ ·´º32 D BE £§¥¡¡¥4¸¦§ CF ·´º+!(/ -µ(» FD ·²!!$-' DB ¤²´º»µ#³ §-´&±' E «²"¾²&' $¼ (»² ¨§¡ ®°¥§'2 AIC ®°¦'2 CA ·²!!$-'»µ%'2 B@ §!+"#µ2 ($(´! 6 AH1@@@ !µ,µ#³ 6 AF1@@@ Faculty, Staff ¡ ¢ ¡ £ ¤ ¥ ¦ £ § ¢ § ¨ © £ ª « ¬ ­ ¤ ¡ ¥ ¡ ¨ ® ¦ ¨ ¡ ¡ ¥ ¦ ¨ ® ¯ « ¦ £ ° ¦ ® § ¨ ° ª « ¡ ¡ £ ¡ ¬±²³´µµ²±µ¶ ·"¸!· §µµ²¹º ¬±²³º¶ »¼¸!· §µµ½º ¬±²³º¶ » ¸!· Solid-State Devices and Nanotechnology Plasma Science Q u a n t u m S c i e n c e a n d D e v i c e s A p p l i e d E l e c t r o m a g n e t i c s E n e r g y a n d P o w e r C o n t r o l S y s t e m s MEMS and Microsystems Robotics and Computer Vision I n t e g r a t e d C i r c u i t s a n d V L S I C o m m u n i c a t i o n s S i g n a l a n d I m a g e P r o c e s s i n g O p t i c s a n d P h o t o n i c s Biomedical Implantable and Health-Care Microsystems RF-MEMS and Wireless Interfaces E n v . M i c r o s y s t e m s , M i c r o f l u i d i c s a n d G a s / C h e m i c a l S e n s o r s M i c r o m a c h i n i n g , P a c k a g i n g , M i c r o p l a s m a- B a s e d M E M S N E M S , N a n o s e n s o r s a n d N a n o m a t e r i a l s P o w e r S o u r c e s & E n e r g y H a r v e s t i n g An Integrated Hybrid Recording Array A fully integrated microsystem for...
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This note was uploaded on 09/02/2010 for the course MEEN 5050 taught by Professor Himanshuj.sant during the Spring '10 term at University of Utah.

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9a - © K. Najafi,2010 slide: 1 Khalil Najafi Center for...

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