8a - (e.g. Pyrex) Least expensive Soda-lime glass Higher...

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Wet Etching of Glass Shallow Microchannels and Bonding Himanshu J. Sant Courtesy: Dr. Neil Crews, Louisiana Tech University • Inert • Optically transparent • Inexpensive
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GLASS POLYSILICON GLASS POLYSILICON PHOTORESIST
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PHOTORESIST GLASS POLYSILICON PHOTORESIST GLASS POLYSILICON
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PHOTORESIST GLASS POLYSILICON PHOTORESIST GLASS POLYSILICON
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+ + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + +
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HF
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d w
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A=wd+1/2(πd 2 )
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HEAT
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Lin, 2001 Verpoorte, 2003 50µm
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Lin, 2001 Types of Materials • Borosilicate glass
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Unformatted text preview: (e.g. Pyrex) Least expensive Soda-lime glass Higher quality glass Better thermal properties Fused silica/quartz Ultra-pure Preferred for UV & high-powered laser applications Photosensitive glass (e.g. Foturan) Anisotropic etch with HF adapted from http://www.mikroglas.com Foturan HF etch rates of Pyrex glass Diepold, 1996 F...
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8a - (e.g. Pyrex) Least expensive Soda-lime glass Higher...

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