11 - Introduction to the LIGA Microfabrication Process...

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Introduction to the LIGA Microfabrication Process Himanshu J. Sant Fundamentals of Microfabrication Outline • What is LIGA? • The LIGA Process – Lithography Techniques – Electroforming – Mold Fabrication • Analyzing Processing Problems
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LI thographie Lithography G alvanoformung Electroforming A bformung Moulding What is LIGA ? The LIGA Process • Lithography – In general terms lithography is an image transfer process using …. • Visible and UV Light • Electron Beam • Ion Beam • Laser Machining • X-ray • For LIGA the key consideration is high aspect ratio structures are required
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Brief History of LIGA Late 70’s Development of concept to fabricate separation nozzles for uranium enrichment at IKVT/KfK (today IMT/FZK) U 235/238 U 235 U 238 Many thousands of nozzles cascaded in an array Tip ~ 3µm Height ~ 300 µm Early 90’s Key processes established, successful fabrication of nozzles and nozzle arrays Use technology for new applications (actuators, sensors, microoptics, microfluidics,….) 1 st company founded (Steag Mikrotechnik, today microParts) Turbine Connector array Motor Brief History of LIGA
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Today Fabrication and test of a number of prototypes Demonstration of mass production capability Professional services in DXRL (Hi-MEMS alliance, ANKA) and molding (Jenoptik, microParts) UV/VIS spectrometer IR spectrometer Brief History of LIGA X-ray mask Resist Substrate Development X-ray Lithography
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11 - Introduction to the LIGA Microfabrication Process...

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