15b - Packaging of Microfluidic and Optical Systems Dr....

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Packaging of Microfluidic and Optical Systems Dr. Himanshu J. Sant Fundamentals of Microfabrication Overview • Packaging in Biomedical Analysis Systems • Packaging of Microscale Bioreactors • Packaging of Micropipettes • Packaging of Microneedles • Packaging of Microchromatography Systems • Packaging of Microfluidic Spotter • Packaging of Integrated Biochip – Microfluidic Extraction – High throughput Microfluidic Manifold – Carbon Nanofiber-based Sensor • Packaging of Combined Systems – Optics – Fluidics
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Considerations in Microscale Biomedical Analysis Systems • Biocompatibility – Defined for each application and system – Cells, proteins, DNA, tissues all have different requirements – Typically low protein absorption, no leaching, “non-reactive” • Harsh chemicals and environment • Small sample handling • Interfacing with macroscale world • Pumps, valves, flow control – High pressures, flow rates, and volumes possible • Sample injection • Multimodal: Fluids, Electrical, Optical, etc. • Interfaces with existing systems (standards) Modular Microsystems • The wide range of biomedical applications will require the use of modular microsystems • Multi-chip modules allow optimization of each component in a serial chain • Components include: separation, mixing, reaction, sample injection, sample preparation, various detection methods, pumping, flow control, control, intelligence, and other analysis • Parallel systems for high throughput • Standardization of platforms and connections
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Upchurch Nanoports • Commercially available • Self sealing to substrate • Expensive • Still very large Microreactors Fluidic vias through wafer, anodically bonded Pyrex cover, microchannel reaction zone Courtesy: Dr. Ron Besser, Stevens Tech, NJ
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Micrographs of Test Chip Fluidic via, 100 μ m microchannels Microreactor Considerations • Gas and liquid flows • Pressures from 10 -2 to 10 5 torr • Some applications require high temperatures (200-500°C) • Sensitivity to alignment of packaging systems
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Seals for Packaging • Vias modified to accept packaging • Standard connections possible • Custom steel jig for attachment • Functions up to 300°C Scale Up and Packaging
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This note was uploaded on 09/02/2010 for the course MEEN 5050 taught by Professor Himanshuj.sant during the Spring '10 term at University of Utah.

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15b - Packaging of Microfluidic and Optical Systems Dr....

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