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15b - Packaging of Microfluidic and Optical Systems Dr...

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Packaging of Microfluidic and Optical Systems Dr. Himanshu J. Sant Fundamentals of Microfabrication Overview Packaging in Biomedical Analysis Systems Packaging of Microscale Bioreactors Packaging of Micropipettes Packaging of Microneedles Packaging of Microchromatography Systems Packaging of Microfluidic Spotter Packaging of Integrated Biochip Microfluidic Extraction High throughput Microfluidic Manifold Carbon Nanofiber-based Sensor Packaging of Combined Systems – Optics – Fluidics
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Considerations in Microscale Biomedical Analysis Systems Biocompatibility Defined for each application and system Cells, proteins, DNA, tissues all have different requirements Typically low protein absorption, no leaching, “non-reactive” Harsh chemicals and environment Small sample handling Interfacing with macroscale world Pumps, valves, flow control High pressures, flow rates, and volumes possible Sample injection Multimodal: Fluids, Electrical, Optical, etc. Interfaces with existing systems (standards) Modular Microsystems The wide range of biomedical applications will require the use of modular microsystems Multi-chip modules allow optimization of each component in a serial chain Components include: separation, mixing, reaction, sample injection, sample preparation, various detection methods, pumping, flow control, control, intelligence, and other analysis Parallel systems for high throughput Standardization of platforms and connections
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Upchurch Nanoports • Commercially available Self sealing to substrate • Expensive Still very large Microreactors Fluidic vias through wafer, anodically bonded Pyrex cover, microchannel reaction zone Courtesy: Dr. Ron Besser, Stevens Tech, NJ
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Micrographs of Test Chip Fluidic via, 100 μ m microchannels Microreactor Considerations Gas and liquid flows Pressures from 10 -2 to 10 5 torr Some applications require high temperatures (200-500°C) Sensitivity to alignment of packaging systems
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Seals for Packaging Vias modified to accept packaging Standard connections possible Custom steel jig for attachment Functions up to 300°C Scale Up and Packaging
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