Com microsystems packaging an introduction page 17

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Unformatted text preview: Sandia National Laboratories Hydrogel Testing Results Microsystems Packaging: An Introduction Page 16 © 2003 Sandia National Laboratories Packaging for Customers: Microtweezers Example MEMSpi.com Microsystems Packaging: An Introduction Page 17 © 2003 Sandia National Laboratories Cool Tweezers: How to Package? Microsystems Packaging: An Introduction Page 18 © 2003 Sandia National Laboratories Microsystems Packaging: An Introduction Page 19 © 2003 Sandia National Laboratories Nice packaging? Microsystems Packaging: An Introduction Page 20 © 2003 Sandia National Laboratories What Could You Build With This? Microsystems Packaging: An Introduction Page 21 © 2003 Sandia National Laboratories MEMS Scanning Mirror: Microvision Microsystems Packaging: An Introduction Page 22 © 2003 Sandia National Laboratories Microsystems Packaging: An Introduction Page 23 © 2003 Sandia National Laboratories Microsystems Packaging: An Introduction Page 24 © 2003 Sandia National Laboratories How would you package it? • MTI Microsystems Microsystems Packaging: An Introduction Page 25 © 2003 Sandia National Laboratories Mirrorcle Technologies Microsystems Packaging: An Introduction Page 26 © 2003 Sandia National Laboratories Microvision MEMS Scanning Mirror System Microsystems Packaging: An Introduction Page 27 © 2003 Sandia National Laboratories Microsystems Packaging: An Introduction Page 28 © 2003 Sandia National Laboratories Microsystems Packaging: An Introduction Page 29 © 2003 Sandia National Laboratories Microsystems Packaging: An Introduction Page 30 © 2003 Sandia National Laboratories Microvision vs. MTI Packaging Microsystems Packaging: An Introduction Page 31 © 2003 Sandia National Laboratories New Technology--Pico Projector Microsystems Packaging: An Introduction Page 32 © 2003 Sandia National Laboratories How Would You Package It? TI DMD Microsystems Packaging: An Introduction Page 33 © 2003 Sandia National Laboratories Alternative Die Separation and Handling Technique • Package MEMS at the wafer level • Then dice and handle them like regular IC die Microsyste...
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