16 - Microsystems Characterization Micromachining Processes...

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1 1 Microsystems Characterization Micromachining Processes Guest Lecture April 5th, 2010 Ian R. Harvey Mn-impregnated Fullerenes–– S.Guruswamy 2 “Unpaid advertisement” for ME 6050, ECE 6225, (also BioEn, MetEn, MSE, ChE) • 2 lectures per wk + 3hr lab + lab lecture • 4 credits (Fall 2010, every other year) • Obtain basic competence in tools of device characterization • Use local microsystems technologies (Fairchild, Merit, Micron, Sandia) to learn these techniques.
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2 3 Characterization Recommended pre/co-requisites Prof. Ameel’s Fundamentals of Microscale Engineering (ME 5620/6620) Solid State Devices (ECE/MSE 5211) -or- – ME 5050/6050 Micromachining 4 You’re building a device… …Verifying what you have built • In-process characterization – Tools for measuring process conformity • Thickness, sheet rho, dielectric properties, microstructure • Post-process characterization – Tools for characterizing process/design interactions: Test structures • Contact resistance (point and statistically averaged) • Sheet rho, specific sub-functions predicting system performance • Construction Analysis (deconstruction, reverse engineering) • Failure Analysis (what went wrong?)
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3 5 Verifying what you have built • In-process characterization –Tools for measuring process conformity • Thickness, • sheet rho, • dielectric properties, • Microstructure
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This note was uploaded on 09/02/2010 for the course MEEN 5050 taught by Professor Himanshuj.sant during the Spring '10 term at University of Utah.

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16 - Microsystems Characterization Micromachining Processes...

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