17b - Optical MEMS Fundamentals of Micromachining Himanshu...

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Optical MEMS Fundamentals of Micromachining Himanshu J. Sant With special thanks to Dr. Michael McShane, Texas A&M University Optical MEMS • MEMS are well-suited for interaction with light – Structural dimensions ~ wavelength – Small displacement has large effect (e. g., ON- OFF switching) • Interferometric devices : d ~ 0.25 λ • Scanning devices : Δ θ ~ a few degrees – Photon has no mass • Does not need large- force actuators – MEMS enables large- scale systems • E. g., 1000x1000 display or optical switches
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Micro-Optics • Driven by communications industry – Couplers, demultiplexers, switches, routers, etc. – Display technology • Mostly elements , not complete systems – Thin-films – MEMS devices – Gratings – Lasers Categories of Optical MEMS • Sources • Waveguide Optics • Free-Space Optics • Transmissive Optics • Reflective Optics • Diffractive Optics • Interference-Mode • Detectors
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Sources • Thermal Emitters • Semiconductor Devices
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This note was uploaded on 09/02/2010 for the course MEEN 5050 taught by Professor Himanshuj.sant during the Spring '10 term at Utah.

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17b - Optical MEMS Fundamentals of Micromachining Himanshu...

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