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18 - However there are some microactuators under...

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Greg Liddiard
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Electrical and Magnetic Microsystems Sensors Pressure Acceleration Gas Actuators Electrostatic Magnetic
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LIS302DL ST Microelectronics 2.16 V to 3.6 V supply voltage 1.8 V compatible IOs <1 mW power consumption ± 2g/± 8g dynamically selectable full-scale Programmable multiple interrupt generator Embedded high pass filter Embedded self test 10000g high shock survivability
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Silicon Sensing
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Attraction Comb Drives DLP Repulsion LCOS
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Attraction
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What about repulsion?
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Unformatted text preview: However, there are some microactuators under investigation. Slide courtesy Dr. Bruce Gale -Used with permission •From S. Chou, “MEMS R&D at Intel,” April 25, 2001 Slide courtesy Dr. Bruce Gale -Used with permission Micromachining Microfluidics • Dr. Bruce Gale Biomedical Microdevices • Dr. Carlos Mastrangelo Sensors and Actuators • Dr. Florian Solzbacher Heterogeneous Microsystems • Dr. Ian Harvey Microsystems Char. • Dr. Ian Harvey Complex Microsystems • Dr. Hanseup Kim Scanning Electron Microscopy • Dr. Ian Harvey Surface Science & Analysis • Dr. Loren Reith Design and Simulation of Microsystems • Dr. Florian Solzbacher MEMS Sensors and Actuators • Dr. Masood Tabib-Azar...
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