21 - ECE 6962: Biomedical Microdevices Microfluidic...

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1 ECE 6962: Biomedical Microdevices Microfluidic Plumbing Technologies Carlos H. Mastrangelo TR 10:45-12:05 WEB 1460 • Learning mainstream methods for construction of microfluidic devices and systems, specifically microplumbing technologies Lecture Objectives By lecture’s end you will • Understand the various fabrication methods for microcapillaries on substrates Understand the choice of materials • Understand the choice of materials available • Understand some of the difficulties associated with specific technologies.
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2 • What is a microfluidic system ? • Fluidic System Characteristics and Scaling •W hy microplumbing ? Outline μ -capillary fab approaches (additive/subtractive) • Glass-based systems • Polymer-based systems • Plastic substrate formation and patterning – Injection molding Micromolding/casting – Micromolding/casting – Laser ablation • Microfluidic Integration ICs • Technology Limitations/Issues Some References • J. Cheng and L. J. Kricka, Biochip Technology , Harwood, Philadelphia, 2001, Chapters 2 and 4 • Microfluidic chip suppliers http://www.microfluidic- chipshop.com/index.php?pre_cat_open=138&id=175&subid=21 8& http://www.caliperls.com • Microfab by Laser ablation http://faculty.washington.edu/yagerp/microfluidicstutorial/polyme riclaminates/polymericlaminates.htm
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3 What is a microfluidic system ? A fluidic system that can accept micrometer-sized input (liquid) samples, process or analyze the samples and provide an output. Microfluidic system Input sample t Ct Measurable Output (signal or Processed sample) reagents Control signal We study these because many analysis techniques require chemical and physical processing of the input sample. The study of microfluidic systems is basic for the understanding of many microinstruments. S1 S2 S3 Characteristics of Macroscopic Fluidic Systems R1 R2 R3 This is a specific sequence Most macroscopic fluidic systems execute a series of steps on perhaps multiple samples hence there is a need to compartmentalize the sample at different steps These systems are essentially reactors
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4 Scaling to Microfluidic Systems Reservoi Microfluidic implementation S1 S2 S3 Substrate Reservoir Reaction Chamber Microfluidic implementation also reflects the same complexity R1 R2 R3 Practical microfluidic system may require many components such reservoirs, dosing and metering, valve, and pump subsystems. With planar technology all of these components should be integrated on the same substrate to avoid big dead volumes. Example μ Fluidic Valves/Pumps ( a Zoo !) diaphragm electrode inlet outlet Flow rectification Bimorph Actuator (30 μm Ni on 30 μm Si) Boss Torsion Bar Suspension and Thermal Isolator Output Gravesern, J. Micromech. Microeng., (3), 1993, 168-182
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5 Microfluidic Systems Need Microplumbing Reservoir Reaction Substrate Chamber There are many kinds of microcomponents valves, pumps, etc.
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21 - ECE 6962: Biomedical Microdevices Microfluidic...

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