wafer_cleaning - Piranha clean 1. 2. 3. 4. Fill two rinse...

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Piranha clean 1. Fill two rinse beakers with DI water. 2. Place magnetic stir bar in bottom of third beaker. 3. Place beaker on hot plate/stirrer. 4. 5:1 H 2 SO 4 : H 2 O 2 Piranha solution a. Pour sulfuric acid into beaker, enough to cover the top of the wafer in Teflon dipper completely when immersed (Do not put wafer in the solution yet!). For 125 mm crystallization dish use about 100 mL H 2 SO 4. b. Heat sulfuric acid to approximately 80 o C. c. Measure out H 2 O 2 in a graduated cylinder so that it is 1/5 the volume of the H 2 SO 4 . For 125 mm crystallization dish use about 20 mL H 2 O 2. d. Very slowly add the H 2 O 2 to the H 2 SO 4 . NOTE: H 2 O 2 reacts with H 2 SO 4 exothermically. The solution will start to bubble and heat up. e. Turn on stirrer. Stir the mixture slowly. If the H 2 O 2 floats on top of the H 2 SO 4 , use a stirring rod to mix the two. BE CAREFUL, this will cause the two to react more quickly. 5.
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This note was uploaded on 09/07/2010 for the course CHEM 4646 taught by Professor Dsas during the Spring '10 term at Abraham Baldwin Agricultural College.

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wafer_cleaning - Piranha clean 1. 2. 3. 4. Fill two rinse...

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