lecture31

lecture31 - 6.720J/3.43J - Integrated Microelectronic...

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6.720J/3.43J - Integrated Microelectronic Devices - Spring 2007 Lecture 31-1 Lecture 31 - The ”Short”± Metal-Oxide-Semiconductor Field-Effect± Transistor (cont.) April 25, 2007 Contents: 1. Short-channel effects (cont.) Reading assignment: P. K. Ko, ” Approaches to Scaling .” Cite as: Jesús del Alamo, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007. MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
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6.720J/3.43J - Integrated Microelectronic Devices - Spring 2007 Lecture 31-2 Key questions Why does the threshold voltage seem to depend on the gate length of a MOSFET? Why does the threshold voltage of a MOSFET seem to depend on V DS ? Cite as: Jesús del Alamo, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007. MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
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6.720J/3.43J - Integrated Microelectronic Devices - Spring 2007 Lecture 31-3 1. Short-channel effects (cont.) V T dependence on Ideally, V T does not depend on L , it only depends on x ox and N A If L is short enough, depletion regions of source and drain start overlapping underneath channel. "long" MOSFET "short" MOSFET n + n + n + n + n + n + p p Δ E C E C E C E fe E V T independent of L V T depends on L: L V T V T V T (long) L Cite as: Jesús del Alamo, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007. MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
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6.720J/3.43J - Integrated Microelectronic Devices - Spring 2007 Lecture 31-4 Complex 2D electrostatic problem: Δ V T depends on the relative strength of the lateral electrostatics vs. the transversal electrostatics ( ”electrostatic integrity” ). The tighter the gate controls φ s , the weaker Δ V T dependence on L .
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This note was uploaded on 09/24/2010 for the course EECS 6.720J taught by Professor Jesúsdelalamo during the Spring '07 term at MIT.

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lecture31 - 6.720J/3.43J - Integrated Microelectronic...

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