introMEMS - What is MEMS(NEMS MEMS Micro Electromechanical...

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What is MEMS(NEMS)? MEMS- Micro Electromechanical System- “devices that have characteristic length of less than 1 mm but more than 1 μ m, that combine electrical and mechanical components and that are fabricated using integrated circuit batch-processing technologies”. (Gad-el-Hak, The MEMS Handbook) MST- Microsystems technology – popular in Europe Micromachines – popular in Asia NEMS- Nano Electromechanical System- extends micromachining into submicron range (top-down) or using nanochemistry (bottom-up) including self-assembly of metal and semiconductor and other particles, template techniques. (Madou, Fundamentals of Microfabrications)
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Why MEMS(NEMS)? Minimizing of energy and material consumption during manufacturing Reduce redundancy Integration with electronics, simplifying systems Reduction of power budget Taking advantages of scaling when scaling is working for us, e.g., faster devices, improved thermal management Increased selectivity and sensitivity Minimally invasive Wider dynamic range Exploration of few effects through the breakdown of continuum theory in the micro/nano domain Cost/performance reproducibility Improved accuracy and reliability Self-assembly and biomimetrics with nanochemistry More intelligent materials with structures at the nanoscale (Madou, Fundamentals of Microfabrications)
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MEMS Application Fields • Automotive IT peripherals Consumer and Lifestyle Products • Telecommunications Medical and Life Sciences Household Appliances Industrial Process Control Aerospace, Defense and Homeland Security
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MEMS Products Read-Write Heads Inkjet heads Microdisplays Pressure Sensors Flow Sensors
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