A-Introduction - - National Chiao-Tung University...

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Unformatted text preview: - National Chiao-Tung University Department of Electronics Engineering & Institute of electronics 1 641 e-mail : bytsui@mail.nctu.edu.tw - National Chiao-Tung University Department of Electronics Engineering & Institute of electronics 2 Course Contents Crystal Growth (4 hours) Thermal Oxidation (5 hours) Thin Film Deposition (6 hours) Impurity Doping (6 hours) Mid term Examination (2 hours) Lithography Technology (6 hours) Etching and Clean (6 hours) CMOS Process Technologies (9 hours) MEMS Process Technologies (3 hours) Final Examination (2 hours) - National Chiao-Tung University Department of Electronics Engineering & Institute of electronics 3 Text Book & References Text Book S. M. Sze, Semiconductor Devices Physics and Technology, 2nd Ed., 2002, J. Wiley & Sons Inc. Reference Books J. D. Plummer, M. D. Deal, and P. B. Griffin, Silicon VLSI Technology- Fundamentals, Practice, and Modeling, 2000, Prentice Hall. Hong Xiao, Introduction to Semiconductor Manufacturing Technology, 2000, Prentice Hall. C. Y. Chang and S. M. Sze, ULSI Technology, McGraw Hill, 1996. Course notes and supplemental literature. Suggested Readings Solid State Technology Semiconductor International - National Chiao-Tung University Department of Electronics Engineering & Institute of electronics 4 Evaluation Home work - 20% Mid-term examination - 30% Final examination - 30% Final report - 20% - National Chiao-Tung University Department of Electronics Engineering & Institute of electronics 5 2 4 6 8 10 12 14 16 1960 1965 1970 1975 1980 1985 1990 1995 2000 Year Wafer Diameter (inches) - National Chiao-Tung University Department of Electronics Engineering & Institute of electronics 6 = (1m=100cm) (cm) = (1mm=0.1cm=10-3 m) (1um=10-4 cm=10-6 m) (1nm=10-3 um=10-9 m) (1A=10-8 cm) 1 mil=10-3 inch=0.00254cm < 1 um < 0.5 um < 0.25 um <0.1 um (<100 nm) 50 - 200 um 2 - 100 um...
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This note was uploaded on 10/18/2010 for the course EECS 216 taught by Professor Davewinn during the Spring '10 term at 카이스트, 한국과학기술원.

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A-Introduction - - National Chiao-Tung University...

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