B-Crystal Growth - Crystal Growth - National Chiao-Tung...

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Unformatted text preview: Crystal Growth - National Chiao-Tung University Department of Electronics Engineering & Institute of electronics 1 Crystal Growth Si crystal growth GaAs crystal growth Crystal properties Epitaxial growth techniques Crystal Growth - National Chiao-Tung University Department of Electronics Engineering & Institute of electronics 2 Process Flow From Starting Material To Polished Wafer Crystal Growth - National Chiao-Tung University Department of Electronics Engineering & Institute of electronics 3 From Sands to Si Crystals Si contained materials Metallurgical-grade : impurity~98% Electronic-grade : impurity~ppb Crystal growth - Ingots Si wafers ) ( ) ( ) ( ) ( ) ( 2 gas CO gas SiO solid Si solid SiO solid SiC + + + ) ( ) ( ) ( 3 ) ( 2 3 300 gas H gas SiHCl gas HCl solid Si C + + ) ( 3 ) ( ) ( ) ( 2 3 gas HCl solid Si gas H gas SiHCl + + Crystal Growth - National Chiao-Tung University Department of Electronics Engineering & Institute of electronics 4 Crystal Parts Crystal Growth - National Chiao-Tung University Department of Electronics Engineering & Institute of electronics 5 Czochralski Method for Crystal Growth Neck is grown to eliminate dislocations generated by thermal shock to seed crystal when it touches the melt. The neck is only 4-6 mm thick for a modern large diameter crystal but can still support the weight of the crystal. Crystal Growth - National Chiao-Tung University Department of Electronics Engineering & Institute of electronics 6 Puller Configuration Crystal Growth - National Chiao-Tung University Department of Electronics Engineering & Institute of electronics 7 Charge Preparation & Loading Materials gathered per specification Seed Dopant Poly-Si Quartz Crucible Graphite Charge Placed in Puller Crystal Growth - National Chiao-Tung University Department of Electronics Engineering & Institute of electronics 8 Melting/Stabilization Polysilicon is melted. Melt temperature brought to thermal equilibrium for crystal growth....
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B-Crystal Growth - Crystal Growth - National Chiao-Tung...

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