hw1.ee245.f09.v7.corr - EE C245 / ME C218 INTRODUCTION TO...

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EE C245 / ME C218 INTRODUCTION TO MEMS DESIGN FALL 2009 - 1 - PROBLEM SET #1 Issued: Thursday, Sept.3, 2009 Due (at 7 p.m.): Tuesday, Sept. 15, 2009 , in the EE C245 HW box in 240 Cory. This homework assignment is intended to give you some early practice playing with dimensions and exploring how scaling can greatly improve certain performance characteristics of mechanical systems. Don’t worry at this point if you do not understand fully some of the physical expressions used. Some of them will be revisited later in the semester. 1. Some of most sensitive MEMS-based sensors utilize changes in a structure’s resonance fre- quency to sense a parameter, e.g., gas concentration, temperature, acceleration, that perturbs the resonance frequency. Such sensors are extremely sensitive because we can often much more precisely detect a shift in frequency than we can a shift in voltage or current. In addition, a frequency output automatically provides a digital output, since one need only count the number of zero crossings of the waveform over a set period of time to provide an integer output.
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hw1.ee245.f09.v7.corr - EE C245 / ME C218 INTRODUCTION TO...

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