hw5.ee245.f09.v3 - EE C245 / ME C218 INTRODUCTION TO MEMS...

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EE C245 / ME C218 INTRODUCTION TO MEMS DESIGN FALL 2009 - 1 - PROBLEM SET #5 Issued: Thursday, Oct. 22, 2009 Due (at 7 p.m.): Thursday, Oct. 29, 2009 , in the EE C245 HW box in 240 Cory. 1. The figure below presents the top view of a small micromechanical filter constructed in a 2 μ m-thick structural layer. Here, everything is suspended 2 μ m above the substrate except for the anchoring locations indicated as the darkly shaded regions. Data on the structural material used in this problem is given in the box below the figure. Also, assume that all folding trusses and shuttles are rigid in all directions, including the vertical (i.e., z ) direction. Also, assume that all suspension and coupling beam widths are 2 μ m. (a) Write an expression for the static spring constant in the x -direction at location A in the figure and calculate its numerical value (with units). (b) Write an expression for the static spring constant in the x -direction at location B in the figure and calculate its numerical value (with units). Structural Material Properties
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This note was uploaded on 10/30/2010 for the course C 218 taught by Professor Clarknguyen during the Fall '09 term at University of California, Berkeley.

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hw5.ee245.f09.v3 - EE C245 / ME C218 INTRODUCTION TO MEMS...

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