Lec1p.Admin&Overview

Lec1p.Admin&Overview - EE C245 ME C218 Introduction...

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EE C245 : Introduction to MEMS Design LecM 1 C. Nguyen 8/20/09 1 EE C245 – ME C218 Introduction to MEMS Design Fall 2009 Prof. Clark T.-C. Nguyen Dept. of Electrical Engineering & Computer Sciences University of California at Berkeley Berkeley, CA 94720 Lecture Module 1 : Admin & Overview EE C245 : Introduction to MEMS Design LecM 1 C. Nguyen 8/20/09 2 Course Overview Goals of the course: ª Accessible to a broad audience (minimal prerequisites) ª Design emphasis ( Exposure to the techniques useful in analytical design of structures, transducers, and process flows ª Perspective on MEMS research and commercialization circa 2009 Related courses at UC Berkeley: ª EE 143: Microfabrication Technology ª CS 194 (EE 147): Introduction to MEMS ª ME 119: Introduction to MEMS (mainly fabrication) ª BioEng 121: Introduction to Micro and Nano Biotechnology and BioMEMS ª ME C219 – EE C246: MEMS Design Assumed background for EE C245: graduate standing in engineering or physical/bio sciences
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EE C245 : Introduction to MEMS Design LecM 1 C. Nguyen 8/20/09 3 What Should You Know? P P Well - NMOS Substrate N Well - PMOS Substrate P N P + P + N + N + S GD S G D G D S S D G Sub Sub EE C245 : Introduction to MEMS Design LecM 1 C. Nguyen 8/20/09 4 What Should You Know?
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EE C245 : Introduction to MEMS Design LecM 1 C. Nguyen 8/20/09 5 Course Overview The mechanics of the course are summarized in the course handouts, given out in lecture today ª Course Information Sheet ( Course description ( Course mechanics ( Textbooks ( Grading policy ª Syllabus ( Lecture by lecture timeline w/ associated reading sections ( Midterm Exam: tentatively set for Thursday, Oct. 23 ( Final Exam: Saturday, Dec. 20, 12:30-3:30 p.m. ( Change this Final Exam time? ( Project due date TBD (but near semester’s end) EE C245 : Introduction to MEMS Design LecM 1 C. Nguyen 8/20/09 6 Lecture Outline Reading: Senturia, Chapter 1 Lecture Topics: ª Definitions for MEMS ª MEMS roadmap ª Benefits of Miniaturization
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EE C245 : Introduction to MEMS Design LecM 1 C. Nguyen 8/20/09 7
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Lec1p.Admin&Overview - EE C245 ME C218 Introduction...

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