Lec3w.BenefitsOfScalingII

Lec3w.BenefitsOfScalingII - •-• Last Time EE 245...

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EE 245: Introduction to MEMS Lecture 3: Benefits of Scaling II CTN 9/3/09 Copyright © 2009 Regents of the University of California Announcements : Discussion Time Change? ª 5-6: still pending Lecture room change: inquired --------------------------------- Today : Reading: Senturia, Chapter 1 Lecture Topics: ª Benefits of Miniaturization ª Examples GHz micromechanical resonators Chip-scale atomic clock Micro gas chromatograph
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Unformatted text preview: •----------------------------------• Last Time : EE 245: Introduction to MEMS Lecture 3: Benefits of Scaling II CTN 9/3/09 Copyright © 2009 Regents of the University of California • HW#1 distributed today • Go through Lecture Module 2, slides 6-26 EE 245: Introduction to MEMS Lecture 3: Benefits of Scaling II CTN 9/3/09 Copyright © 2009 Regents of the University of California...
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This note was uploaded on 10/30/2010 for the course C 218 taught by Professor Clarknguyen during the Fall '09 term at Berkeley.

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Lec3w.BenefitsOfScalingII - •-• Last Time EE 245...

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