Lec4w.BenefitsOfScalingIII

Lec4w.BenefitsOfScalingIII - Copyright 2009 Regents of the...

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EE 245: Introduction to MEMS Lecture 4: Benefits of Scaling III CTN 9/8/09 Copyright © 2009 Regents of the University of California Announcements : Discussion Time Change? ª 5-6: still pending --------------------------------- Today : Reading: Senturia, Chapter §11.1-11.6 Lecture Topics: ª Benefits of Miniaturization ª Thermal Circuits ---------------------------------- Last Time :
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EE 245: Introduction to MEMS Lecture 4: Benefits of Scaling III CTN 9/8/09 Copyright © 2009 Regents of the University of California
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EE 245: Introduction to MEMS Lecture 4: Benefits of Scaling III CTN 9/8/09
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Unformatted text preview: Copyright 2009 Regents of the University of California EE 245: Introduction to MEMS Lecture 4: Benefits of Scaling III CTN 9/8/09 Copyright 2009 Regents of the University of California EE 245: Introduction to MEMS Lecture 4: Benefits of Scaling III CTN 9/8/09 Copyright 2009 Regents of the University of California 300x300x300 m 3 Atomic Cell @ 80 o C Long, Thin Polysilicon Tethers T Sensor (underneath) Heater Laser 25 o C...
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Lec4w.BenefitsOfScalingIII - Copyright 2009 Regents of the...

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