Lec8w.SurfaceMicromachining - Reading: Senturia Chpt. 3,...

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EE 245: Introduction to MEMS Lecture 8: Surface Micromachining I CTN 9/22/09 Copyright © 2009 Regents of the University of California Announcements : Lecture this Thursday? ª Vote: should we strike? ª Yes: 15 ª No: 13 ª No lecture this Thursday; we’ll make it up next Monday, at 5 p.m., during the time and in the location of the dicussion section --------------------------------- Today : Finish process modules from Module 4
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Unformatted text preview: Reading: Senturia Chpt. 3, Jaeger Chpt. 11, Handout: Surface Micromachining for Microelectromechanical Systems Lecture Topics: Polysilicon surface micromachining Stiction Residual stress Topography issues Nickel metal surface micromachining 3D pop-up MEMS Foundry MEMS: the MUMPS process The Sandia SUMMIT process ----------------------------------...
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