Lec8w.SurfaceMicromachining

Lec8w.SurfaceMicromachining - • Reading Senturia Chpt 3...

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EE 245: Introduction to MEMS Lecture 8: Surface Micromachining I CTN 9/22/09 Copyright © 2009 Regents of the University of California Announcements : Lecture this Thursday? ª Vote: should we strike? ª Yes: 15 ª No: 13 ª No lecture this Thursday; we’ll make it up next Monday, at 5 p.m., during the time and in the location of the dicussion section --------------------------------- Today : Finish process modules from Module 4
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Unformatted text preview: • Reading: Senturia Chpt. 3, Jaeger Chpt. 11, Handout: “Surface Micromachining for Microelectromechanical Systems” ª Lecture Topics: ª Polysilicon surface micromachining ª Stiction ª Residual stress ª Topography issues ª Nickel metal surface micromachining ª 3D “pop-up” MEMS ª Foundry MEMS: the “MUMPS” process ª The Sandia SUMMIT process •----------------------------------...
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This note was uploaded on 10/30/2010 for the course C 218 taught by Professor Clarknguyen during the Fall '09 term at Berkeley.

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