Lec9w.SurfaceMicromachiningII

Lec9w.SurfaceMicromachiningII - • Remarks • Often want...

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EE 245: Introduction to MEMS Lecture 9: Surface Micromachining II/Stiction CTN 9/28/09 Copyright © 2009 Regents of the University of California Announcements : This is our make-up lecture from last Thursday’s strike HW#2 is due tomorrow night at 7 p.m. --------------------------------- Today : Finish surface micromachining process from Module 5 Reading: Senturia Chpt. 3, Jaeger Chpt. 11, Handout: “Surface Micromachining for Microelectromechanical Systems” ª Lecture Topics: ª Polysilicon surface micromachining ª Stiction ª Residual stress ª Topography issues ª Nickel metal surface micromachining ª 3D “pop-up” MEMS ª Foundry MEMS: the “MUMPS” process ª The Sandia SUMMIT process ---------------------------------- Go through initial stiction slides from Module 5 Continue surface micromachining from last time
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Unformatted text preview: • Remarks: • Often want sloped sidewalls in order to reduce the sharpness of corners ª Sharp corners concentrate stresses ª High stress can weaken structures creating a reliabilty concern ª High stress can dissipate more energy, lowering Q EE 245: Introduction to MEMS Lecture 9: Surface Micromachining II/Stiction CTN 9/28/09 Copyright © 2009 Regents of the University of California • When you want straight sidewalls (e.g., for lateral electrostatic drive), use a hard mask ª PR can’t last for thick structures ª A hard mask suppresses angle transfer EE 245: Introduction to MEMS Lecture 9: Surface Micromachining II/Stiction CTN 9/28/09 Copyright © 2009 Regents of the University of California...
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  • Fall '09
  • ClarkNguyen
  • Microelectromechanical systems, Surface micromachining, CTN, Bulk Micromachining, MEMS Foundry MEMS, Surface Micromachining II/Stiction

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Lec9w.SurfaceMicromachiningII - • Remarks • Often want...

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