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Unformatted text preview: • Remarks: • Often want sloped sidewalls in order to reduce the sharpness of corners ª Sharp corners concentrate stresses ª High stress can weaken structures creating a reliabilty concern ª High stress can dissipate more energy, lowering Q EE 245: Introduction to MEMS Lecture 9: Surface Micromachining II/Stiction CTN 9/28/09 Copyright © 2009 Regents of the University of California • When you want straight sidewalls (e.g., for lateral electrostatic drive), use a hard mask ª PR can’t last for thick structures ª A hard mask suppresses angle transfer EE 245: Introduction to MEMS Lecture 9: Surface Micromachining II/Stiction CTN 9/28/09 Copyright © 2009 Regents of the University of California...
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- Fall '09
- Microelectromechanical systems, Surface micromachining, CTN, Bulk Micromachining, MEMS Foundry MEMS, Surface Micromachining II/Stiction