Lec10w.SurfaceMicromachiningIII

Lec10w.SurfaceMicromachiningIII - Polysilicon surface...

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EE 245: Introduction to MEMS Lecture 10: Surface Micromachining III CTN 9/29/09 Copyright © 2009 Regents of the University of California Announcements : HW#2 is due tomorrow night at 7 p.m. Time for Make-Up Lectures: ª Lec: M 5-6:30; Dis: Th 3:30-5 --------------------------------- Today : Reading: Senturia Chpt. 3, Jaeger Chpt. 11, Handout: “Surface Micromachining for Microelectromechanical Systems” Lecture Topics: ª
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Unformatted text preview: Polysilicon surface micromachining ª Stiction ª Residual stress ª Topography issues ª Nickel metal surface micromachining ª 3D “pop-up” MEMS ª Foundry MEMS: the “MUMPS” process ª The Sandia SUMMIT process •----------------------------------• Last Time : EE 245: Introduction to MEMS Lecture 10: Surface Micromachining III CTN 9/29/09 Copyright © 2009 Regents of the University of California...
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Lec10w.SurfaceMicromachiningIII - Polysilicon surface...

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