Lec11w.BulkMicromachining

Lec11w.BulkMicromachining - Residual stress Topography...

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EE 245: Introduction to MEMS Lecture 11: Bulk Micromachining CTN 10/1/09 Copyright © 2009 Regents of the University of California Announcements : Lecture schedule for the next 4 weeks: Midterm Exam: ª Evening of Th, Oct. 29? 7, 10 × ª Class Period of Tu, Nov. 3? 7, ll 9 ª Tu, Oct.27 ? 8 × ---------------------------------- 6 5 Lecture 3:30-5 Moffitt 4 3 Midterm 3:30-5 Moffitt Nov. 2 Lecture 5-6:30 241 Cory 30 29 Lecture 3:30-5 Moffitt 28 27 26 Discuss 3:30-5 Moffitt 23 22 Lecture 3:30-5 Moffitt 21 20 Lecture 3:30-5 Moffitt 19 Lecture 5-6:30 241 Cory 16 15 Discuss 3:30-5 Moffitt 14 13 12 Lecture 5-6:30 241 Cory 9 8 Discuss 3:30-5 Moffitt 7 6 Lecture 3:30-5 Moffitt Oct. 5 Lecture 5-6:30 241 Cory Friday Thursday Wednesday Tuesday Monday Today : Reading: Senturia Chpt. 3, Jaeger Chpt. 11, Handout: “Surface Micromachining for Microelectromechanical Systems” Lecture Topics: ª Polysilicon surface micromachining ª Stiction
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Unformatted text preview: Residual stress Topography issues Nickel metal surface micromachining 3D pop-up MEMS Foundry MEMS: the MUMPS process The Sandia SUMMIT process ---------------------------------- Reading: Senturia Chpt. 3, Jaeger Chpt. 11, Handouts: Bulk Micromachining of Silicon Lecture Topics: Bulk Micromachining Anisotropic Etching of Silicon Boron-Doped Etch Stop Electrochemical Etch Stop Isotropic Etching of Silicon Deep Reactive Ion Etching (DRIE) ---------------------------------- Finish up surface micromachining Module 5 Start through bulk micromachining Module 6 EE 245: Introduction to MEMS Lecture 11: Bulk Micromachining CTN 10/1/09 Copyright 2009 Regents of the University of California...
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Lec11w.BulkMicromachining - Residual stress Topography...

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