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Lec11w.BulkMicromachining

Lec11w.BulkMicromachining - ª Residual stress ª...

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EE 245: Introduction to MEMS Lecture 11: Bulk Micromachining CTN 10/1/09 Copyright © 2009 Regents of the University of California Announcements : Lecture schedule for the next 4 weeks: Midterm Exam: ª Evening of Th, Oct. 29? 7, 10 × ª Class Period of Tu, Nov. 3? 7, ll 9 ª Tu, Oct.27 ? 8 × ---------------------------------- 6 5 Lecture 3:30-5 Moffitt 4 3 Midterm 3:30-5 Moffitt Nov. 2 Lecture 5-6:30 241 Cory 30 29 Lecture 3:30-5 Moffitt 28 27 26 Discuss 3:30-5 Moffitt 23 22 Lecture 3:30-5 Moffitt 21 20 Lecture 3:30-5 Moffitt 19 Lecture 5-6:30 241 Cory 16 15 Discuss 3:30-5 Moffitt 14 13 12 Lecture 5-6:30 241 Cory 9 8 Discuss 3:30-5 Moffitt 7 6 Lecture 3:30-5 Moffitt Oct. 5 Lecture 5-6:30 241 Cory Friday Thursday Wednesday Tuesday Monday Today : Reading: Senturia Chpt. 3, Jaeger Chpt. 11, Handout: “Surface Micromachining for Microelectromechanical Systems” Lecture Topics: ª Polysilicon surface micromachining ª Stiction
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Unformatted text preview: ª Residual stress ª Topography issues ª Nickel metal surface micromachining ª 3D “pop-up” MEMS ª Foundry MEMS: the “MUMPS” process ª The Sandia SUMMIT process •----------------------------------• Reading: Senturia Chpt. 3, Jaeger Chpt. 11, Handouts: “Bulk Micromachining of Silicon” • Lecture Topics: ª Bulk Micromachining ª Anisotropic Etching of Silicon ª Boron-Doped Etch Stop ª Electrochemical Etch Stop ª Isotropic Etching of Silicon ª Deep Reactive Ion Etching (DRIE) •----------------------------------• Finish up surface micromachining Module 5 • Start through bulk micromachining Module 6 EE 245: Introduction to MEMS Lecture 11: Bulk Micromachining CTN 10/1/09 Copyright © 2009 Regents of the University of California...
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