Lec12w.MechanicsOfMaterialsI

Lec12w.MechanicsOfMaterialsI - EE 245: Introduction to MEMS...

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EE 245: Introduction to MEMS Lecture 12: Mechanics of Materials I CTN 10/5/09 Copyright © 2009 Regents of the University of California Announcements : Lecture schedule for the next 4 weeks: Midterm Exam: ª Tu, Nov. 3, during regular lecture ª 1.5 hours, but might go longer ---------------------------------- 6 5 Lecture 3:30-5 Moffitt 4 3 Midterm 3:30-5 Moffitt Nov. 2 Lecture 5-6:30 241 Cory 30 29 Lecture 3:30-5 Moffitt 28 27 26 Discuss 3:30-5 Moffitt 23 22 Lecture 3:30-5 Moffitt 21 20 Lecture 3:30-5 Moffitt 19 Lecture 5-6:30 241 Cory 16 15 Discuss 3:30-5 Moffitt 14 13 12 Lecture 5-6:30 241 Cory 9 8 Discuss 3:30-5 Moffitt 7 6 Lecture 3:30-5 Moffitt Oct. 5 Lecture 5-6:30 241 Cory Friday Thursday Wednesday Tuesday Monday Today : Reading: Senturia Chpt. 3, Jaeger Chpt. 11, Handouts: “Bulk Micromachining of Silicon” Lecture Topics: ª Bulk Micromachining ª Anisotropic Etching of Silicon ª Boron-Doped Etch Stop ª Electrochemical Etch Stop ª Isotropic Etching of Silicon
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Lec12w.MechanicsOfMaterialsI - EE 245: Introduction to MEMS...

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