Lec14w.BeamBending

Lec14w.BeamBending - EE 245: Introduction to MEMS Lecture...

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EE 245: Introduction to MEMS Lecture 14: Beam Bending CTN 10/13/09 Copyright © 2009 Regents of the University of California 1 Announcements : Lecture schedule for the next 4 weeks: Monday Tuesday Wednesday Thursday Friday Oct. 5 Lecture 5-6:30 241 Cory 6 Lecture 3:30-5 Moffitt 78 Discuss 3:30-5 Moffitt 9 12 Lecture 5-6:30 241 Cory 13 14 15 Discuss 3:30-5 Moffitt 16 19 Lecture 5-6:30 241 Cory 20 Lecture 3:30-5 Moffitt 21 22 Lecture 3:30-5 Moffitt 23 26 27 28 29 30 Discuss 3:30-5 Moffitt Lecture 3:30-5 Moffitt Nov. 2 3 45 6 Midterm Exam: Lecture 5-6:30 241 Cory Midterm 3:30-5 Moffitt Lecture 3:30-5 Moffitt ª Tu, Nov. 3, during regular lecture ª 1.5 hours, but might go longer HW#3 due Thursday, 10/15, at 7 p.m. Today : Reading: Senturia, Chpt. 8 Lecture Topics: tress, strain, etc., for isotropic materials ª Stress, strain, etc., for isotropic materials ª Thin films: thermal stress, residual stress, and stress gradients ª Internal dissipation ª MEMS material properties and performance metrics ---------------------------------- Reading: Senturia, Chpt. 9
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Lec14w.BeamBending - EE 245: Introduction to MEMS Lecture...

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