Lec15p.MicrostructuralElements

Lec15p.MicrostructuralElements - EE 245: Introduction to...

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EE 245: Introduction to MEMS Lecture 15: Stress Gradients CTN 10/19/09 1 Copyright © 2009 Regents of the University of California Stress Gradients in Cantilevers EE C245 : Introduction to MEMS Design LecM 8 C. Nguyen 9/28/07 16 Vertical Stress Gradients Variation of residual stress in the direction of film growth Can warp released structures in z-direction EE C245 : Introduction to MEMS Design LecM 8 C. Nguyen 9/28/07 17 Measurement of Stress Gradient Use cantilever beams ª Strain gradient ( Γ = slope of stress-thickness curve) causes beams to deflect up or down ª Assuming linear strain gradient Γ , z ~ Γ L 2 /2 gg , [P. Krulevitch Ph.D.] EE C245 : Introduction to MEMS Design LecM 8 C. Nguyen 9/28/07 20 Folded-Flexure Suspensions EE C245 : Introduction to MEMS Design LecM 8 C. Nguyen 9/28/07 21
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EE 245: Introduction to MEMS Lecture 15: Stress Gradients CTN 10/19/09 2 Copyright © 2009 Regents of the University of California
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Lec15p.MicrostructuralElements - EE 245: Introduction to...

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