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Lec16p.BeamCombos

# Lec16p.BeamCombos - EE 245 Introduction to MEMS Lecture 16...

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EE 245: Introduction to MEMS Lecture 16: Beam Combos CTN 10/20/09 1 Copyright © 2009 Regents of the University of California Folded-Beam Stiffness Ratios In the x-direction: In the z direction: Folded-beam suspension 3 24 L EI k z x = In the z-direction: ª Same flexure and boundary conditions In the y-direction: Shuttle 3 24 L EI k x z = EWh 8 EE C245 : Introduction to MEMS Design LecM 8 C. Nguyen 9/28/07 31 Thus: Anchor Folding truss L k y = 2 4 = W L k k x y Much stiffer in y-direction! [See Senturia, §9.2] Folded-Beam Suspensions Permeate MEMS Gyroscope [Draper Labs.] Accelerometer [ADXL-05, Analog Devices] EE C245 : Introduction to MEMS Design LecM 8 C. Nguyen 9/28/07 32 Micromechanical Filter [K. Wang, Univ. of Michigan] Folded-Beam Suspensions Permeate MEMS Below : Micro-Oven Controlled Folded-Beam Resonator EE C245 : Introduction to MEMS Design LecM 8 C. Nguyen 9/28/07 33 Stressed Folded-Flexures EE C245 : Introduction to MEMS Design LecM 8 C. Nguyen 9/28/07 34

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EE 245: Introduction to MEMS Lecture 16: Beam Combos CTN 10/20/09
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