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Lec17p.EnergyMethods

Lec17p.EnergyMethods - EE 245 Introduction to MEMS Lecture...

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EE 245: Introduction to MEMS Lecture 17: Energy Methods CTN 10/22/09 Copyright © 2009 Regents of the University of California EE C245 : Introduction to MEMS Design LecM 9 C. Nguyen 9/28/07 5 Solution : Use Principle of Virtual Work In an energy-conserving system (i.e., elastic materials), the energy stored in a body due to the quasi-static (i.e., slow) action of surface and body forces is equal to the work done by these forces … Implication : if we can formulate stored energy as a function of the deformation of a mechanical object, then we can determine how an object responds to a force by determining the shape the object must take in order to minimize minimize the difference difference U between the stored energy and the work done by the forces: U = Stored Energy - Work Done Key idea : we don’t have to reach U = 0 to produce a very useful, approximate analytical result for load-deflection EE C245 : Introduction to MEMS Design LecM 9 C. Nguyen 9/28/07 10 Shear Strain Energy See W.C. Albert, “Vibrating Quartz Crystal Beam Accelerometer,” Proc. ISA Int. Instrumentation Symp., May 1982, pp. 33-44 Shear Modulus EE C245
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