Lec18p.ResFreq

Lec18p.ResFreq - Q ~10,000 v i Resonator Beam Electrode i o...

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EE 245: Introduction to MEMS CTN 10/29/09 Copyright © 2009 Regents of the University of California EE C245 : Introduction to MEMS Design LecM 9 C. Nguyen 9/28/07 19 Estimating Resonance Frequency EE C245 : Introduction to MEMS Design LecM 9 C. Nguyen 9/28/07 20 L r h W r V P v i Clamped-Clamped Beam μ Resonator ω ω ο i v o i
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Unformatted text preview: Q ~10,000 v i Resonator Beam Electrode i o ] cos[ t V v o i i = ] cos[ t F f o i i = Voltage-to-Force Capacitive Transducer Sinusoidal Forcing Function Sinusoidal Excitation o : small amplitude = o : maximum amplitude beam reaches its maximum potential and kinetic energies...
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